Investigation of Airborne Molecular Contamination in...

Applied Sciences 2020 / 02 Vol. 10; Iss. 3

Investigation of Airborne Molecular Contamination in Cleanroom Air Environment through Portable Soft X-Ray Radiolysis Detector

Kim, Changhyuk, Cho, Kyungil, Pui, David Y. H.
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Volume:
10
Journal:
Applied Sciences
DOI:
10.3390/app10030978
Date:
February, 2020
File:
PDF, 2.00 MB
2020
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