Fabrication of a magnesium-ion-conducting magnesium phosphate electrolyte film using atomic layer deposition
Tsuruoka, Tohru, Tsujita, Takuji, Su, Jin, Nishitani, Yu, Hamamura, Tomofumi, Inatomi, Yuu, Nakura, Kensuke, TERABE, KazuyaJournal:
Japanese Journal of Applied Physics
DOI:
10.35848/1347-4065/ab79e8
Date:
February, 2020
File:
PDF, 537 KB
2020