Analysis of (111) Nanotwin Lamellae Hillocks in Poly-silicon Thin Films Transistor
Fujimoto, Masayuki, Koyama, Hiroshi, Imai, ShigekiVolume:
45
Year:
2006
Journal:
Materia Japan
DOI:
10.2320/materia.45.849
File:
PDF, 1.17 MB
2006