Charge Trap Analysis of Nanolayer Si3N4 and SiO2 by...

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Physica B: Condensed Matter 2020 / 3

Charge Trap Analysis of Nanolayer Si3N4 and SiO2 by Electron Irradiation Assisted Photoelectron Emission

Dekhtyar, Yuri, Enichek, Gennady, Romanova, Marina, Schmidt, Ben, Vilken, Aleksandr, Yager, Tom, Zaslavski, Aleksandr
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Journal:
Physica B: Condensed Matter
DOI:
10.1016/j.physb.2020.412123
Date:
March, 2020
File:
PDF, 3.17 MB
2020
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