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Auto-tuning of model-based feedforward controller by feedback control signal in ultraprecision motion systems
Dai, Luyao, Li, Xin, Zhu, Yu, Zhang, MingVolume:
142
Journal:
Mechanical Systems and Signal Processing
DOI:
10.1016/j.ymssp.2020.106764
Date:
August, 2020
File:
PDF, 1.70 MB
2020