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[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - A 0.1µM-Resoution Silicon Tactile Sensor with Precisely Designed Piezoresitve Sensing Structure
Nakashima, Tsubasa, Watatani, Kazuki, Terao, Kyohei, Shimokawa, Fusao, Takao, HidekuniYear:
2019
DOI:
10.1109/TRANSDUCERS.2019.8808467
File:
PDF, 895 KB
2019