[IEEE 2019 IEEE 26th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - Hangzhou, China (2019.7.2-2019.7.5)] 2019 IEEE 26th International Symposium on Physical and Failure Analysis of Integrated Circuits (IPFA) - High Resolution Mapping of Defects at SiO 2 /SiC Interfaces by Local-DLTS Based on Time-Resolved Scanning Nonlinear Dielectric Microscopy
Yamagishi, Yuji, Cho, YasuoYear:
2019
DOI:
10.1109/ipfa47161.2019.8984905
File:
PDF, 1.06 MB
2019