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Back-End-of-Line Nano-Electro-Mechanical Switches for Reconfigurable Interconnects
Sikder, Urmita, Usai, Giulia, Yen, Ting-Ta, Horace-Herron, Kelsey, Hutin, Louis, Liu, Tsu-Jae KingYear:
2020
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2020.2974473
File:
PDF, 3.99 MB
2020