Structural and Dielectric Study of Thin Amorphous Layers of...

Semiconductors 2020 / 2 Vol. 54; Iss. 2

Structural and Dielectric Study of Thin Amorphous Layers of the Ge–Sb–Te System Prepared by RF Magnetron Sputtering

Castro-Arata, R. A., Stozharov, V. M., Dolginsev, D. M., Kononov, A. A., Saito, Y., Fons, P., Tominaga, J., Anisimova, N. I., Kolobov, A. V.
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Volume:
54
Journal:
Semiconductors
DOI:
10.1134/S106378262002013X
Date:
February, 2020
File:
PDF, 434 KB
2020
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