Research on adhesion strength and optical properties of SiC...

Chinese Journal of Physics 2020 / 04 Vol. 64

Research on adhesion strength and optical properties of SiC films obtained via RF magnetron sputtering

Wang, Yizhe, Tuofu, Zha-ma, Yue, Zhenming, Sun, Hui, Gong, Jianhong, Gao, Jun
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Volume:
64
Journal:
Chinese Journal of Physics
DOI:
10.1016/j.cjph.2020.01.006
Date:
April, 2020
File:
PDF, 1.78 MB
2020
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