[IEEE 2019 International Conference on Microwave and Millimeter Wave Technology (ICMMT) - Guangzhou, China (2019.5.19-2019.5.22)] 2019 International Conference on Microwave and Millimeter Wave Technology (ICMMT) - Fabrication of 50 nm Metallic Lines for High Frequency Devices
Liu, Xiaoyi, Liao, Biyan, Gao, Sheng, Wang, HongYear:
2019
DOI:
10.1109/icmmt45702.2019.8992410
File:
PDF, 6.42 MB
2019