Adjusting the Spectral Response of Silicon Photodiodes by...

Russian Microelectronics 2005 / 5 Vol. 34; Iss. 3

Adjusting the Spectral Response of Silicon Photodiodes by Additional Dopant Implantation

I. V. Vanyushin, V. A. Gergel’, V. A. Zimoglyad, Yu. I. Tishin
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Volume:
34
Language:
english
Pages:
5
DOI:
10.1007/s11180-005-0024-5
Date:
May, 2005
File:
PDF, 70 KB
english, 2005
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