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Evaluating the Wall-Recombination Constant of Cl Atoms in Cl2-Ar Plasmas of Different Ar Percentage
Yu. V. Kirillov, D. V. SitanovVolume:
34
Language:
english
Pages:
5
DOI:
10.1007/s11180-005-0031-6
Date:
July, 2005
File:
PDF, 66 KB
english, 2005