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Cyclic Silylselenides: Convenient Selenium Precursors for Atomic Layer Deposition
Charvot, Jaroslav, Pokorný, Daniel, Zazpe, Raul, Krumpolec, Richard, PavliÅák, David, Hromádko, LudÄk, PÅikryl, Jan, Rodriguez-Pereira, Jhonatan, Klikar, Milan, JelÃnková, Veronika, Macak, JanJournal:
ChemPlusChem
DOI:
10.1002/cplu.202000108
Date:
March, 2020
File:
PDF, 1.79 MB
2020