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Numerical Study of the Discharge Spatial Characteristics Influence on the KrF Laser Generation
Yampolskaya, Sofia A., Yastremskii, Arkady G., Panchenko, Yuri N., Puchikin, Alexey V., Bobrovnikov, Sergey M.Volume:
56
Language:
english
Journal:
IEEE Journal of Quantum Electronics
DOI:
10.1109/JQE.2020.2976532
Date:
April, 2020
File:
PDF, 4.21 MB
english, 2020