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[IEEE 2019 Chinese Automation Congress (CAC) - Hangzhou, China (2019.11.22-2019.11.24)] 2019 Chinese Automation Congress (CAC) - Research on Internal Temperature Distribution of Crystals in CZ Silicon Single Crystal Growth Process Based on Finite Element Model
Wan, Yin, Liu, Ding, Ren, Jun-Chao, Liu, Cong-CongYear:
2019
Language:
english
DOI:
10.1109/cac48633.2019.8997216
File:
PDF, 601 KB
english, 2019