The effect of substrate material on the properties of...

Russian Physics Journal 2011 / 05 Vol. 53; Iss. 12

The effect of substrate material on the properties of tantalum oxide films

V. M. Kalygina, A. T. Zyryanov, V. A. Novikov, Yu. S. Petrova, M. S. Skakunov, O. P. Tolbanov, A. V. Tyazhev, T. M. Yaskevich
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Volume:
53
Language:
english
Pages:
6
DOI:
10.1007/s11182-011-9566-7
Date:
May, 2011
File:
PDF, 1.30 MB
english, 2011
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