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A Study of Fabrication and Characterization of Ultra-Small Polycrystalline Silicon Islands for Advanced Display and Microsensor Applications
Schmidt, Dominik, Shi, Frank, Pianetta, PieroVolume:
715
Year:
2002
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-715-a3.2
File:
PDF, 1.11 MB
english, 2002