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Axial Distribution of the Ion Mass-to-Charge State in a Magnetron Discharge Plasma
Shandrikov, M. V., Artamonov, I. D., Vizir, A. V., Bugaev, A. S., Oks, E. M.Language:
english
Journal:
Russian Physics Journal
DOI:
10.1007/s11182-020-01934-7
Date:
March, 2020
File:
PDF, 222 KB
english, 2020