Study of Low Energy (50 keV) Silicon Negative ion...

Study of Low Energy (50 keV) Silicon Negative ion Implantation in GaAs

Yadav, Ajay, Dubey, Seshmani, Dubey, Radhekrishna, Subramanyam, Nagaraju, Sulania, Indra
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Volume:
23
Year:
2020
Language:
english
Journal:
Materials Today: Proceedings
DOI:
10.1016/j.matpr.2020.02.029
File:
PDF, 1.79 MB
english, 2020
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