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Study of Low Energy (50 keV) Silicon Negative ion Implantation in GaAs
Yadav, Ajay, Dubey, Seshmani, Dubey, Radhekrishna, Subramanyam, Nagaraju, Sulania, IndraVolume:
23
Year:
2020
Language:
english
Journal:
Materials Today: Proceedings
DOI:
10.1016/j.matpr.2020.02.029
File:
PDF, 1.79 MB
english, 2020