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Development of super-smooth flat silicon mirror substrates using bowl-feed chemical-mechanical polishing
Belure, A.R., Biswas, A.K., Raghunathan, D., Rishipal,, Bhartiya, S., Singh, Rashmi, Rai, S.K., Pawade, R.S., Kamath, M.P., Benerji, N.S.Language:
english
Journal:
Materials Today: Proceedings
DOI:
10.1016/j.matpr.2020.02.490
Date:
March, 2020
File:
PDF, 1.71 MB
english, 2020