![](/img/cover-not-exists.png)
Study of the Ti/InGaAs solid-state reactions: Phase formation sequence and diffusion schemes
Bensalem, S., Ghegin, E., Boyer, F., Lábár, J.L., Menyhárd, M., Gergaud, P., Nemouchi, F., Rodriguez, Ph.Volume:
113
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2020.105038
Date:
July, 2020
File:
PDF, 2.39 MB
english, 2020