Polarity Inversion of Aluminum Nitride Thin Films by using...

Scientific Reports 2020 / 12 Vol. 10; Iss. 1

Polarity Inversion of Aluminum Nitride Thin Films by using Si and MgSi Dopants

Anggraini, Sri Ayu, Uehara, Masato, Hirata, Kenji, Yamada, Hiroshi, Akiyama, Morito
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Volume:
10
Language:
english
Journal:
Scientific Reports
DOI:
10.1038/s41598-020-61285-8
Date:
December, 2020
File:
PDF, 4.87 MB
english, 2020
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