![](/img/cover-not-exists.png)
Evolution of the surface states during the in situ SiN layer formation on AlN/GaN heterostructures
Zhuravlev, Konstantin S, Mansurov, Vladimir G, Galitsyn, Yury G, Malin, Timur V, Milakhin, Denis Sergeevich, Valery, ZemlyakovLanguage:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/1361-6641/ab7e44
Date:
March, 2020
File:
PDF, 1.54 MB
english, 2020