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IEEE Transactions on Semiconductor Manufacturing 2020

Active Learning of Convolutional Neural Network for Cost-Effective Wafer Map Pattern Classification

Shim, Jaewoong, Kang, Seokho, Cho, Sungzoon
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Year:
2020
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/TSM.2020.2974867
File:
PDF, 1.11 MB
english, 2020
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