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[IEEE 2019 Winter Simulation Conference (WSC) - National Harbor, MD, USA (2019.12.8-2019.12.11)] 2019 Winter Simulation Conference (WSC) - Influence of Spare Parts Service Measures on the Performance of Front-End Wafer Production Process
Lamghari-Idrissi, Douniel, Soellaart, Daniel, Basten, Rob, Dellaert, NicoYear:
2019
Language:
english
DOI:
10.1109/wsc40007.2019.9004919
File:
PDF, 343 KB
english, 2019