Design and development of field emission based magnetron...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2020 / 03 Vol. 38; Iss. 2

Design and development of field emission based magnetron for industrial applications using conformal finite-difference time-domain particle-in-cell simulations

Li, Ling, Aranganadin, Kaviya, Hsu, Hua-Yi, Lin, Ming-Chieh
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Volume:
38
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5140723
Date:
March, 2020
File:
PDF, 2.22 MB
english, 2020
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