Simple masking method for selective atomic layer deposition...

Simple masking method for selective atomic layer deposition of thin films

Hashemi Astaneh, Sarah, Sukotjo, Cortino, Takoudis, Christos G., Feinerman, Alan
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Volume:
38
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/6.0000146
Date:
March, 2020
File:
PDF, 3.12 MB
english, 2020
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