Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2020 / 03 Vol. 38; Iss. 2
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Simple masking method for selective atomic layer deposition of thin films
Hashemi Astaneh, Sarah, Sukotjo, Cortino, Takoudis, Christos G., Feinerman, AlanVolume:
38
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/6.0000146
Date:
March, 2020
File:
PDF, 3.12 MB
english, 2020