Assessing the Oxidative Degradation of N-Methylpyrrolidone...

Journal of Analytical Methods in Chemistry 2020 / 03 Vol. 2020

Assessing the Oxidative Degradation of N-Methylpyrrolidone (NMP) in Microelectronic Fabrication Processes by Using a Multiplatform Analytical Approach

Lennon, Gavin, Willox, Shannon, Ramdas, Ragini, Funston, Scott J., Klun, Matthew, Pieh, Robert, Fairlie, Stewart, Dobbin, Sara, Cobice, Diego F.
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Volume:
2020
Language:
english
Journal:
Journal of Analytical Methods in Chemistry
DOI:
10.1155/2020/8265054
Date:
March, 2020
File:
PDF, 2.07 MB
english, 2020
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