Direct matter disassembly via electron beam control: Electron-beam-assisted catalytic etching of graphene by nanoparticles
Dyck, Ondrej, Lingerfelt, David, Kim, Songkil, Jesse, Stephen, Kalinin, Sergei VLanguage:
english
Journal:
Nanotechnology
DOI:
10.1088/1361-6528/ab7ef8
Date:
March, 2020
File:
PDF, 982 KB
english, 2020