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In operando x-ray photoelectron spectroscopy study of mechanism of atomic layer etching of cobalt
Wang, Zijian, Opila, Robert L.Volume:
38
Language:
english
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5138989
Date:
March, 2020
File:
PDF, 2.04 MB
english, 2020