Effect of Various CVD-Coated Conditioning Disc Designs and Polisher Kinematics on Fluid Flow Characteristics during CMP
Mariscal, Juan Cristobal, Sampurno, Yasa, Slutz, Dave, Philipossian, AraVolume:
9
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2162-8777/ab6830
Date:
January, 2020
File:
PDF, 1.33 MB
english, 2020