![](/img/cover-not-exists.png)
True 3D-AFM sensor for nanometrology
Thiesler, Jan, Tutsch, Rainer, Fromm, Karsten, Dai, GaoliangLanguage:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/1361-6501/ab7efd
Date:
March, 2020
File:
PDF, 1.52 MB
english, 2020