Effect of DC negative bias on microstructure and surface morphology of amorphous silicon carbide films prepared by HWP-CVD
Ji, Peiyu, Chen, Jiali, Huang, Tianyuan, Jin, Chenggang, Zhuge, Lanjian, Wu, XuemeiVolume:
126
Language:
english
Journal:
Applied Physics A
DOI:
10.1007/s00339-020-3349-3
Date:
April, 2020
File:
PDF, 1.60 MB
english, 2020