Ray Tracing Simulation of Images of Dislocations and Inclusions on X-Ray Topographs of GaAs Epitaxial Wafers
Peng, Hongyu, Ailihumaer, Tuerxun, Raghothamachar, Balaji, Dudley, MichaelLanguage:
english
Journal:
Journal of Electronic Materials
DOI:
10.1007/s11664-020-07981-7
Date:
February, 2020
File:
PDF, 2.83 MB
english, 2020