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[IEEE 2019 Compound Semiconductor Week (CSW) - Nara, Japan (2019.5.19-2019.5.23)] 2019 Compound Semiconductor Week (CSW) - Novel Fabrication Technique of Suspended Nanowire Devices for Nanomechanical Applications
Tomita, Wataru, Sasaki, Satoshi, Tateno, Kouta, Okamoto, Hajime, Yamaguchi, HiroshiYear:
2019
Language:
english
DOI:
10.1109/iciprm.2019.8819191
File:
PDF, 1.50 MB
english, 2019