Flexible Al 2 O...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2020 / 03 Vol. 38; Iss. 2

Flexible Al 2 O 3 /plasma polymer multilayer moisture barrier films deposited by a spatial atomic layer deposition process

Kim, Sun Jung, Yong, Sang Heon, Choi, You Jin, Hwangbo, Hyeok, Yang, Woo-Young, Chae, Heeyeop
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
38
Language:
english
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5130727
Date:
March, 2020
File:
PDF, 2.29 MB
english, 2020
Conversion to is in progress
Conversion to is failed