Plasma Diagnostics in Reactive High-Power Impulse Magnetron...

Plasma Diagnostics in Reactive High-Power Impulse Magnetron Sputtering System Working in Ar + H2S Gas Mixture

Hubička, Z., Čada, M., Kapran, A., Olejníček, J., Kšírová, P., Zanáška, M., Adámek, P., Tichý, M.
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Volume:
10
Language:
english
Journal:
Coatings
DOI:
10.3390/coatings10030246
Date:
March, 2020
File:
PDF, 1.91 MB
english, 2020
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