Plasma Diagnostics in Reactive High-Power Impulse Magnetron Sputtering System Working in Ar + H2S Gas Mixture
HubiÄka, Z., Äada, M., Kapran, A., OlejnÃÄek, J., KÅ¡Ãrová, P., Zanáška, M., Adámek, P., Tichý, M.Volume:
10
Language:
english
Journal:
Coatings
DOI:
10.3390/coatings10030246
Date:
March, 2020
File:
PDF, 1.91 MB
english, 2020