Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2020 / 03 Vol. 38; Iss. 2
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Optimal design and fabrication of ITO photonic crystal using e-beam patterned hydrogen silsesquioxane resist
Solard, Jeanne, Chakaroun, Mahmoud, Boudrioua, AzzedineVolume:
38
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5142533
Date:
March, 2020
File:
PDF, 3.20 MB
english, 2020