A Wafer Level Packaged Fully Integrated Tunable...

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Journal of Microelectromechanical Systems 2020

A Wafer Level Packaged Fully Integrated Tunable Fabry-Pérot Filter With Extended Optical Range For Multispectral and Hyperspectral Imaging

Levin, Peleg, Ashkenazy, Eli, Raz, Ariel, Hershcovitz, Miriam, Bouwstra, Siebe, Mendlovic, David, Krylov, Slava
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Year:
2020
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2020.2975568
File:
PDF, 4.32 MB
english, 2020
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