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Correlation Between Ferroelectricity and Nitrogen Incorporation of Undoped Hafnium Dioxide Thin Films
Luo, Jun-Dao, Yeh, Yun-Tien, Lai, Yu-Ying, Wu, Chia-Feng, Chung, Hao-Tung, Li, Yi-Shao, Chuang, Kai-Chi, Li, Wei-Shuo, Chen, Pin-Guang, Lee, Min-Hung, Cheng, Huang-ChungLanguage:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2020.109317
Date:
March, 2020
File:
PDF, 1.60 MB
english, 2020