A Simple and Robust Fabrication Process for SU-8 In-Plane...

Micromachines 2020 / 03 Vol. 11; Iss. 3

A Simple and Robust Fabrication Process for SU-8 In-Plane MEMS Structures

Ge, Chang, Cretu, Edmond
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Volume:
11
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi11030317
Date:
March, 2020
File:
PDF, 4.61 MB
english, 2020
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