Novel Method for Electroless Etching of 6H–SiC

Novel Method for Electroless Etching of 6H–SiC

Károlyházy, Gyula, Beke, Dávid, Zalka, Dóra, Lenk, Sándor, Krafcsik, Olga, Kamarás, Katalin, Gali, Ádám
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Volume:
10
Language:
english
Journal:
Nanomaterials
DOI:
10.3390/nano10030538
Date:
March, 2020
File:
PDF, 1.63 MB
english, 2020
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