Electrical description of an inductively coupled plasma processing reactor with discharge parameters calculated from a global model
Cao, Minglu, Lu, Yijia, Cheng, Jia, Ji, LinhongVolume:
10
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.5145296
Date:
March, 2020
File:
PDF, 1.48 MB
english, 2020