[IEEE 2020 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus) - St. Petersburg and Moscow, Russia (2020.1.27-2020.1.30)] 2020 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus) - Technological Design of the MEMS-Accelerometer Sensor Element for Ultra-Large Acceleration Ranges
Golovinskiy, Maxim S., Kruchinin, Sergey M., Musatkin, Aleksandr S., Burakov, Mikhail M., Gornostaev, Pavel A.Year:
2020
Language:
english
DOI:
10.1109/EIConRus49466.2020.9039038
File:
PDF, 12.96 MB
english, 2020