Phase retrieval between overlapping orders in coherent Fourier scatterometry using scanning
Kumar, N., Gawhary, O. El, Roy, S., Pereira, S. F., Urbach, H. P.Volume:
8
Language:
english
Journal:
Journal of the European Optical Society: Rapid Publications
DOI:
10.2971/jeos.2013.13048
Date:
July, 2013
File:
PDF, 4.61 MB
english, 2013