Atomic Layer Densification of AlN Passivation Layer on...

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Atomic Layer Densification of AlN Passivation Layer on Epitaxial Ge for Enhancement of Reliability and Electrical Performance of high-K Gate Stacks

Wang, Chin I, Chang, Teng-Jan, Yin, Yu-Tung, Jiang, Yu-Sen, Shyue, Jing-Jong, Chen, Miin-Jang
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Language:
english
Journal:
ACS Applied Electronic Materials
DOI:
10.1021/acsaelm.9b00819
Date:
March, 2020
File:
PDF, 1.69 MB
english, 2020
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