Real-time Optical Dimensional Metrology via Diffractometry...

Scientific Reports 2020 / 12 Vol. 10; Iss. 1

Real-time Optical Dimensional Metrology via Diffractometry for Nanofabrication

Whitworth, Guy L., Francone, Achille, Sotomayor-Torres, Clivia M., Kehagias, Nikolaos
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Volume:
10
Language:
english
Journal:
Scientific Reports
DOI:
10.1038/s41598-020-61975-3
Date:
December, 2020
File:
PDF, 1.52 MB
english, 2020
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