Ionisation fractions of sputtered titanium species at target and substrate region in HiPIMS
Bernátová, KatarÃna, Fekete, Matej, Klein, Peter, Hnilica, Jaroslav, Vasina, PetrLanguage:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/1361-6595/ab82b1
Date:
March, 2020
File:
PDF, 2.57 MB
english, 2020