[IEEE 2019 IEEE 2nd Ukraine Conference on Electrical and Computer Engineering (UKRCON) - Lviv, Ukraine (2019.7.2-2019.7.6)] 2019 IEEE 2nd Ukraine Conference on Electrical and Computer Engineering (UKRCON) - Use of Three-Step Interferometry with Arbitrary Phase Shifts for Retrieval and Monitoring of Nanoscale Rough Surfaces
Muravsky, Leonid, Voronyak, Taras, Stasyshyn, Ihor, Fitio, VolodymyrYear:
2019
Language:
english
DOI:
10.1109/ukrcon.2019.8879955
File:
PDF, 918 KB
english, 2019